Pneumatic drive bellows pumps

Pneumatic drive bellows pumps

Durability of bellows pumps that form the core, has already been proven by their robust sales record over more than 20 years. All wetted parts use fluoroplastic, and they can handle chemicals used in semiconductor applications such as acids, alkalis, and excess water. External surface of pumps is coated with fluoroplastic so that no metal part is exposed.

• FLP series
• FS-N series
• FS-100HT2
• FS-H series
• FW / FW-H series
• FF / FF-H series
• FA series
• SB series
• Chemical replenishing pumps CFD